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PVD Products Ships dual chamber IBAD system based on Evaporation

PVD Products shipped a dual chamber IBAD system to a major Coated Conductor provider this week.  The system includes two evaporation chambers and is based on the work developed by Stanford and LANL.  The system includes complete tape transport, RF ion beam precleaninig, a large IBAD deposition zone with multi-track capability, scanning RHEED in-situ film evaluation, and a Homo-Epi deposition chamber with a multi zone substrate heater.  The system is fully computer controlled.  This system adds to the list of various thin film coated-conductor deposition tools provided by PVD Products.

Topics: news

Written by PVD Staff

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