The PLD 2000 and PLD 3000 systems provide uniform multilayer films deposited by PLD over substrates up to 3 inches in diameter. These systems include complete software packages and can be used to grow combinatorial thin films as well.
The PLD 5000 and PLD 6000 are capable of depositing high quality uniform films on substrates up to 6 inches (150 mm) in diameter. Our systems use a box-style chamber with a large front-mounted hinged door. This allows for very easy access to the substrate and target.
