PLD Substrate Heaters

All temperatures quoted are SUBSTRATE temperatures, not heater element or susceptor temperatures. All temperatures quoted do not require the use of silver or platinum paste to bond sample to back plate. Throw distances are adjustable via computer control for all systems unless otherwise specified.

Throw Distance = Target to Substrate Distance. This distance is adjustable using motorized translation stages.  Note, maximum substrate temperature and temperature uniformity may vary slightly as the throw distance is reduced.

PVD Products provides a variety of substrate heaters depending on the deposition system, as noted below. Our heaters are typically based in IR lamps or diode lasers for small samples.

System Max Substrate Temperature Temperature Uniformity Heater Type Target-to-Substrate Distance
Nano PLD 950ºC/850ºC ±4ºC BB 4 IR Lamps 75-mm1
PLD 2000 950ºC/850ºC ±3°C BB 6 IR Lamps 40-75-mm
PLD 3000 950ºC/850ºC ±3°C BB 6 IR Lamps 40-75-mm
PLD 4000 950ºC/850ºC ±5ºC BB 12 IR Lamps 55-125-mm
PLD 5000 950ºC/850ºC ±5°C BB 12 IR Lamps 55-125-mm
PLD 6000 950ºC/850ºC ±5°C BB 12 IR Lamps 75-150-mm
PLD 8000 950ºC/850ºC ±7°C BB 16 IR Lamps* 80-150-mm
PLD 12000 950ºC/850ºC ±7°C BB 18 IR Lamps* 100-175-mm
         
PLD/MBE 2100 950ºC/850ºC ±4°C O 4 IR Lamps 50-100-mm
PLD/MBE 2300 950ºC/850ºC ±4ºC O 4 IR Lamps 50-100-mm
PLD/MBE 2500 950ºC/850ºC ±4ºC O 4 IR Lamps/td> 50-100-mm
PLD/MBE 2100L 1,100ºC/1,000ºC ±2°C O Diode Laser 50-100-mm
PLD/MBE 2300L 1,100ºC/1,000ºC ±2°C O Diode Laser 50-100-mm
PLD/MBE 2500L 1,100ºC/1,000ºC ±2°C O Diode Laser 50-100-mm

1) Optional 50-100-mm via motorized computer control
*) Dual Zone Heaters
BB – Black body style heater
O – Open face heater
L – Diode laser heater
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