A customized deposition system can help you achieve the best results with maximum efficiency. For example, a well-designed combinatorial deposition system can execute a program to produce a wide range of slightly different film compositions, each deposited within discrete test pads on a single substrate. This makes it possible to explore an enormous range of material combinations and structures within a single wafer run. Effective combinatorial deposition experiments require precise control over several deposition parameters, such as selection from multiple magnetrons and types of power supplies, target-to-substrate distance, mass flows from multiple MFCs, pressure, test pad exposure time, and exact substrate position. With full control of all parameters, practically any desired recipe can be executed within each test pad.