PVD Blog

New PLD System Installed

PVD Products had installed a unique turn-key PLD system for 300 mm wafers in a large semiconductor fab. This system is married to a central robot and wafer handler. Besides using one of PVD's unique X-Y-Θ type target manipulator this PLD this system also included a multipocket electron beam evaporation unit and high temperature heater.

Topics: news

Written by PVD Staff

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