The system includes:
- 10 position loadlock with elevator
- Brooks robot chamber
- preclean chamber and deposition chamber with three targets
Also included are substrate heating to 850°C, and a high power femto second laser. This system provides Picodeon with the next generation of ColdAb production oriented tools for large substrate sizes (visit www.picoedeon.com) Picodeon interviewed several PLD vendors before selecting PVD Products for the design and fabrication of this unique tool.