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PVD Products provides pulsed laser deposition (PLD) targets for a wide range of applications from ferromagnetic, complex oxides, and superconducting films. Metal targets are offered in various purity levels to suit your specific requirements, with the minimum purity of 99.9% up to 99.99% for some metals like aluminum, copper, and molybdenum, and ultra-high purities of 99.995%-99.9995+% for aluminum, tellurium, titanium, cadmium, silicon and molybdenum.
A wide selection of compound-based PLD targets are available: oxides, nitrides, borides, sulfides, selenides, tellurides, carbides, crystalline and composite mixtures. To achieve the best performance and to prevent the target from cracking or over-heating, we strongly recommend bonding any material target to a backing plate. Target bonding is a critical process, and the exact fabricating method employed can vary depending on the choice of the target material. A properly bonded PLD target will normally give a longer working life than a non-bonded target, may enable the use of a higher power input to achieve faster deposition rates, and will enable thin film process parameters to be consistently repeated.
| Element | Symbol |
| Aluminum | Al |
| Cadmium | Cd |
| Cobalt | Co |
| Europium | Eu |
| Hafnium | Hf |
| Iron | Fe |
| Magnesium | Mg |
| Nickel | Ni |
| Praseodymium | Pr |
| Scandium | Sc |
| Tantalum | Ta |
| Tin | Sn |
| Ytterbium | Yb |
| Element | Symbol |
| Antimony | Sb |
| Carbon | C |
| Copper | Cu |
| Gadolinium | Gd |
| Holmium | Ho |
| Lanthanum | La |
| Manganese | Mn |
| Niobium | Nb |
| Rhenium | Re |
| Selenium | Se |
| Tellurium | Te |
| Titanium | Ti |
| Yttrium | Y |
| Element | Symbol |
| Bismuth | Bi |
| Cerium | Ce |
| Dysprosium | Dy |
| Germanium | Ge |
| Indium | In |
| Lead | Pb |
| Molybdenum | Mo |
| Palladium | Pd |
| Ruthenium | Ru |
| Silicon | Si |
| Terbium | Tb |
| Tungsten | W |
| Zinc | Zn |
| Element | Symbol |
| Boron | B |
| Chromium | Cr |
| Erbium | Er |
| Gold | Au |
| Iridium | Ir |
| Lutetium | Lu |
| Neodymium | Nd |
| Platinum | Pt |
| Samarium | Sm |
| Silver | Ag |
| Thulium | Tm |
| Vanadium | V |
| Zirconium | Zr |
| Boride Targets |
| Cr2B, CrB, CrB2, Cr5B3, FeB, HfB2 ,LaB6, Mo2B, Mo2B5 ,NbB, NbB2, TaB,TaB2, TiB2,W2B, WB, VB, VB2, ZrB2 |
| Carbide Targets |
| B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, TiCN, WC, W2C, WC+Ni,WC+Co, VC, ZrC |
| Fluoride Targets |
| AlF3, BaF3, CdF2, CaF2, CeF3, DyF3, ErF3, HfF4, KF, LaF3, PbF2, LiF, PrF3,MgF2, NdF3,ReF3, SmF3, SrF2, NaF, Cryolite Na3AlF6 , YF3, YbF3 |
| Nitride Targets |
| AlN, BN, GaN, HfN, NbN, Si3N4, TICN, TaN, TiN, VN, ZrN |
| Oxide Targets |
| Al2O3, Sb2O3, ATO ,BaTiO3, Bi2O3, CeO2, Cr-SiO, Cu2O,ITO,CuO, Cr2O3,Dy2O3,Er2O3, Eu2O3, Gd2O3, Ga2O3, GeO2, HfO2, Ho2O3, IGZO, In2O3,ITO, Fe2O3, Fe3O4,LaAl2O3, La2O3, LaSrMnO3, PbO, PbTiO3, PbZrO3,LiNbO3, Lu3Fe5O12, Lu2O3, MgO,MoO3, NiO, Nb2O5, Nd2O3,PZT (PbZrTiO3), Pr6O11, Pr(TiO2)2, Pr2O3, Sm2O3, Sc2O3,SiO2, SiO,SrRuO3, SrTiO3, SrZrO3, Ta2O5, Tb4O7, TeO2, ThO2, Tm2O3, TiO2, TiO,Ti3O5, Ti2O3, TiZrO3, SnO2, SnO, WO3, WO2.9, V2O5, YAG, YBCO,Y3Al5O12, Yb2O3, Y2O3, ZnO, AZO, ZnO:Al, ZrO2(unstabilized),ZrO2-5-15 wt% CaO) |
| Selenide Targets |
| Al2Se3, Sb2Se3, As2Se3, Bi2Se3, CdSe, CuSe, Cu2Se, Ga2Se3, GeSe, In2Se3,PbSe,MoSe2, MnSe, NbSe2, TaSe2, WSe2, ZnSe |
| Silicide Targets |
| Cr2Si, CrSi2, Co3Si, HfSi2, FeSi2, MoSi2, Mo5Si3, NiSi, NbSi2, Nb5Si3, TaSi2,Ta5Si3,TiSi2, Ti5Si3, WSi2, WS2, V3Si, VSi2, ZrSi2 |
| Sulphide Targets |
| As2S3, AgS, Ag2S, Bi2S3, CuS, Cu2S, Sb2S3, CdS, FeS, GaS, GeS, In2S3,PbS, MoS2,NbS1.75, TaS2, SnS, WS2, ZnS |
| Tellurides Targets |
| Al2Te3, As2Te3, SbTe, Bi2Te3, CdTe, CuTe, GaTe, Ga2Te3, GeTe, PbTe,MoTe2, NbTe2,As2Te, TaTe2, SnTe, TmTe, WTe2, ZnTe |
| Antimonide Targets |
| AlSb, CdSb, GaSb, InSb, In2Sb3, NiSb, PbSb, SnSb & ZnSb |
| Arsenide Targets |
| Cd2As2, GaAs, InAs, PbAs, SnAs, ZnAs2 & Zn2As2 |