PLD System Overview

Pulsed Laser Deposition (PLD) systems typically use a focused pulsed excimer or Nd:YAG laser to vaporize a small section of a solid target material in a vacuum chamber in order to produce a thin film with the same chemical composition as the original target material. The PLD process enables the deposition of many complex materials over a wide range of background gas compositions and pressures. Furthermore, other types of lasers including ps and fs lasers can be utilized, and alternative techniques such as Matrix Assisted Pulsed Laser Evaporation (MAPLE) and Resonant IR Pulsed Laser Evaporation systems are available with appropriate lasers.

PVD Products offers a wide variety of PLD systems for substrates ranging in size from 5 mm square up to 300 mm in diameter. We also can provide PLD systems for roll-to-roll applications. PVD Products will be glad to assist in the selection of the proper PLD tool for your particular application. Most systems are completely computer controlled for ease of use.

PLD/MBE System Workflow

PLD/MBE Deposition Options

 

Learn more about the specific system elements

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