PLD System Chambers

PLD Load Lock Compatibility

All of PVD Products vacuum chamber and substrate spinner assemblies are completely load lock compatible. Substrates can be inserted into the main chamber through a gate valve using a magnetic transfer arm. 

Our smaller systems including the Nano PLD, PLD-2000, PLD-3000 and all the PLD/MBE systems include our dual-wafer load lock systems. These load locks allow the user to remove one wafer from the deposition chamber and insert a new wafer into the deposition chamber in one pump-down cycle, greatly enhancing the utility of the load lock. Our larger PLD chambers typically utilize a direct transfer mechanism for wafer changes. However, we can provide multi-wafer load locks too.

Systems that include a load lock will achieve base pressures below 5 x 10-8 Torr. With optional UHV packages, pressures below 5 x 10-9 Torr or below are readily achievable.

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