PLD

PVD Products, Inc. is the premier manufacturer of Pulsed Laser Deposition Systems for R&D, pilot production, and full production capabilities for a variety of applications. PVD Products has pulsed laser deposition systems to Fortune 500 companies, national laboratories, start-up companies, and universities around the world. Our growing customer base has many repeat customers buying more than four or five systems over several years. Our systems are backed with prompt and very strong technical support.

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PLD System Overview

Pulsed Laser Deposition (PLD) systems typically use a focused pulsed excimer or Nd:YAG laser to vaporize a small section of a solid target material in a vacuum chamber in order to produce a thin film with the same chemical composition as the original target material. The PLD process enables the deposition of many complex materials over a wide range of background gas compositions and pressures.

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PLD for R&D and Production

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Nano PLD

Our very popular low-cost Nano PLD system is designed for researchers interested in small-scale thin film materials development and is high pressure RHEED compatible. This system can handle wafers up to 2 inches (50.4 mm) in diameter as well as smaller samples. Though this is our most basic system, the Nano PLD doesn’t compromise onmany of the key features of our larger area and more sophisticated PLD systems.

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PLD Polymer Film Deposition via MAPLE

Polymer deposition from a vapor phase produced by laser ablation requires the use of low energy photons in the Visible to Near Infrared (VIS/NIR) range of wavelengths. PVD Products offers two approaches to PLD polymer films, Matrix Assisted Pulsed Laser Evaporation (MAPLE) and VIS/NIR Resonant Infrared Absorption. Both systems are based on our Nano PLD chamber design.

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Large Area R&D and Pilot Production Tools

PVD Products’ R&D and Pilot Production Pulsed Laser Deposition Systems are capable of depositing high quality uniform films on substrates up to 6 inches in diameter.

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PLD/MBE

PLD/MBE 2100, 2300, and 2500 systemsoffer the user a wide choice of features that cannot be matched by any other PLD systems on the market today. These systems are designed specifically to grow epitaxial films, mono-layer by mono-layer film structures, and/or combinatorial thin films and can easily be integrated with a wide variety of other deposition techniques and sources.

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fs and ps PLD Systems

Femto and pico second PLD systems provide efficient coupling to target materials, resulting in very high deposition rates. In addition, femto and pico second PLD systems may significantly reduce particulate sizes under the proper conditions. PVD Products can provide complete PLD systems based on our standard designs including Nano PLD, the PLD/MBE series, and large area PLD systems. These systems are available including a variety of lasers with a wide range of power levels to meet your specific needs.

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PLD Targets

PVD Products provides pulsed laser deposition (PLD) targets for a wide range of applications from ferromagnetic, complex oxides, and semiconducting films. Metal targets are offered in various purity levels to suit your specific requirements.

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Combinatorial PLD

Our Nano PLD, PLD/MBE series, or larger PLD deposition systems provide a complete PLD combinatorial thin films PLD solution. Custom systems can be provided as well.

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PLD Production Systems

PVD Products can help with the design and science behind your production coating process, right from the start. Our PLD Production Systems are capable of depositing high quality uniform films on substrates up to 12 inches in diameter.

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PLD 2300_Intelligent Window.jpgPLD Components

PVD Products provides a full array of PLD components for your custom PLD tool. Our PLD components will be specifically designed for your custom or OEM PLD system, and 3-D solid models will be provided for approval before the manufacture of the customized parts. In most cases, we can retrofit our components to most custom or other OEM systems.

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Richard Thomson | RTA Instrument

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