metal sputtering targets

Sputtering Targets

PVD Products provides sputtering targets for a wide range of applications from ferromagnetic, complex oxides, and semiconducting films. Our standard round target sizes range from 1 inch to 20 inches in diameter, and the rectangular targets are available in lengths up to and over 2000 mm in single or multiple-piece construction, depending on the metal. Metal targets are offered in various purity levels to suit your specific requirements, with the minimum purity of 99.9% up to 99.99% for some metals like aluminum, copper, and molybdenum, and ultra-high purities of 99.995%-99.9995+% for aluminum, tellurium, titanium, cadmium, silicon, and molybdenum.

Metal Sputtering Targets

Element Symbol
Aluminum Al
Cadmium Cd
Cobalt Co
Europium Eu
Hafnium Hf
Iron Fe
Magnesium Mg
Nickel Ni
Praseodymium Pr
Scandium Sc
Element Symbol
Antimony Sb
Carbon C
Copper Cu
Gadolinium Gd
Holmium Ho
Lanthanum La
Manganese Mn
Niobium Nb
Rhenium Re
Selenium Se
Element Symbol
Bismuth Bi
Cerium Ce
Dysprosium Dy
Germanium Ge
Indium In
Lead Pb
Molybdenum Mo
Palladium Pd
Ruthenium Ru
Silicon Si
Element Symbol
Boron B
Chromium Cr
Erbium Er
Gold Au
Iridium Ir
Lutetium Lu
Neodymium Nd
Platinum Pt
Samarium Sm
Silver Ag

Compound Sputtering Targets

Boride Sputtering Targets
Cr2B, CrB, CrB2, Cr5B3, FeB, HfB2 ,LaB6, Mo2B, Mo2B5 ,NbB, NbB2, TaB,TaB2, TiB2, W2B, WB, VB, VB2, ZrB2
Carbide Sputtering Targets
B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, TiCN, WC, W2C, WC+Ni,WC+Co, VC, ZrC
Fluoride Sputtering Targets
AlF3, BaF3, CdF2, CaF2, CeF3, DyF3, ErF3, HfF4, KF, LaF3, PbF2, LiF, PrF3,MgF2, NdF3, ReF3, SmF3, SrF2, NaF, Cryolite Na3AlF6 , YF3, YbF3
Nitride Sputtering Targets
AlN, BN, GaN, HfN, NbN, Si3N4, TICN, TaN, TiN, VN, ZrN
Oxide Sputtering targets
Al2O3, Sb2O3, ATO ,BaTiO3, Bi2O3, CeO2, Cr-SiO, Cu2O,ITO,CuO, Cr2O3,Dy2O3 ,Er2O3, Eu2O3, Gd2O3, Ga2O3, GeO2, HfO2, Ho2O3, IGZO, In2O3,ITO, Fe2O3, Fe3O4, LaAl2O3, La2O3, LaSrMnO3, PbO, PbTiO3, PbZrO3,LiNbO3, Lu3Fe5O12, Lu2O3, MgO, MoO3, NiO, Nb2O5, Nd2O3,PZT (PbZrTiO3), Pr6O11, Pr(TiO2)2, Pr2O3, Sm2O3, Sc2O3, SiO2, SiO,SrRuO3, SrTiO3, SrZrO3, Ta2O5, Tb4O7, TeO2, ThO2, Tm2O3, TiO2, TiO,Ti3O5, Ti2O3, TiZrO3, SnO2, SnO, WO3, WO2.9, V2O5, YAG, YBCO,Y3Al5O12, Yb2O3, Y2O3, ZnO, AZO, ZnO:Al, ZrO2(unstabilized),ZrO2-5-15 wt% CaO)
Selenide Sputtering Targets
Al2Se3, Sb2Se3, As2Se3, Bi2Se3, CdSe, CuSe, Cu2Se, Ga2Se3, GeSe, In2Se3,PbSe, MoSe2, MnSe, NbSe2, TaSe2, WSe2, ZnSe
Silicide Sputtering Targets
Cr2Si, CrSi2, Co3Si, HfSi2, FeSi2, MoSi2, Mo5Si3, NiSi, NbSi2, Nb5Si3, TaSi2,Ta5Si3, TiSi2, Ti5Si3, WSi2, WS2, V3Si, VSi2, ZrSi2
Sulphide Sputtering Targets
As2S3, AgS, Ag2S, Bi2S3, CuS, Cu2S, Sb2S3, CdS, FeS, GaS, GeS, In2S3,PbS, MoS2, NbS1.75, TaS2, SnS, WS2, ZnS
Tellurides Sputtering Targets
Al2Te3, As2Te3, SbTe, Bi2Te3, CdTe, CuTe, GaTe, Ga2Te3, GeTe, PbTe,MoTe2, NbTe2, As2Te, TaTe2, SnTe, TmTe, WTe2, ZnTe
Antimonide Sputtering Targets
AlSb, CdSb, GaSb, InSb, In2Sb3, NiSb, PbSb, SnSb & ZnSb
Arsenide Sputtering Targets
Cd2As2, GaAs, InAs, PbAs, SnAs, ZnAs2 & Zn2As2

Customize A System

Do you know the specifications you need to reach?
Contact us to discuss a custom system.

Site Meter