Boride Targets |
Cr2B, CrB, CrB2, Cr5B3, FeB, HfB2 ,LaB6, Mo2B, Mo2B5 ,NbB, NbB2, TaB,TaB2, TiB2,W2B, WB, VB, VB2, ZrB2 |
Carbide Targets |
B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, TiCN, WC, W2C, WC+Ni,WC+Co, VC, ZrC |
Fluoride Targets |
AlF3, BaF3, CdF2, CaF2, CeF3, DyF3, ErF3, HfF4, KF, LaF3, PbF2, LiF, PrF3,MgF2, NdF3,ReF3, SmF3, SrF2, NaF, Cryolite Na3AlF6 , YF3, YbF3 |
Nitride Targets |
AlN, BN, GaN, HfN, NbN, Si3N4, TICN, TaN, TiN, VN, ZrN |
Oxide Targets |
Al2O3, Sb2O3, ATO ,BaTiO3, Bi2O3, CeO2, Cr-SiO, Cu2O,ITO,CuO, Cr2O3,Dy2O3,Er2O3, Eu2O3, Gd2O3, Ga2O3, GeO2, HfO2, Ho2O3, IGZO, In2O3,ITO, Fe2O3, Fe3O4,LaAl2O3, La2O3, LaSrMnO3, PbO, PbTiO3, PbZrO3,LiNbO3, Lu3Fe5O12, Lu2O3, MgO,MoO3, NiO, Nb2O5, Nd2O3,PZT (PbZrTiO3), Pr6O11, Pr(TiO2)2, Pr2O3, Sm2O3, Sc2O3,SiO2, SiO,SrRuO3, SrTiO3, SrZrO3, Ta2O5, Tb4O7, TeO2, ThO2, Tm2O3, TiO2, TiO,Ti3O5, Ti2O3, TiZrO3, SnO2, SnO, WO3, WO2.9, V2O5, YAG, YBCO,Y3Al5O12, Yb2O3, Y2O3, ZnO, AZO, ZnO:Al, ZrO2(unstabilized),ZrO2-5-15 wt% CaO) |
Selenide Targets |
Al2Se3, Sb2Se3, As2Se3, Bi2Se3, CdSe, CuSe, Cu2Se, Ga2Se3, GeSe, In2Se3,PbSe,MoSe2, MnSe, NbSe2, TaSe2, WSe2, ZnSe |
Silicide Targets |
Cr2Si, CrSi2, Co3Si, HfSi2, FeSi2, MoSi2, Mo5Si3, NiSi, NbSi2, Nb5Si3, TaSi2,Ta5Si3,TiSi2, Ti5Si3, WSi2, WS2, V3Si, VSi2, ZrSi2 |
Sulphide Targets |
As2S3, AgS, Ag2S, Bi2S3, CuS, Cu2S, Sb2S3, CdS, FeS, GaS, GeS, In2S3,PbS, MoS2,NbS1.75, TaS2, SnS, WS2, ZnS |
Tellurides Targets |
Al2Te3, As2Te3, SbTe, Bi2Te3, CdTe, CuTe, GaTe, Ga2Te3, GeTe, PbTe,MoTe2, NbTe2,As2Te, TaTe2, SnTe, TmTe, WTe2, ZnTe |
Antimonide Targets |
AlSb, CdSb, GaSb, InSb, In2Sb3, NiSb, PbSb, SnSb & ZnSb |
Arsenide Targets |
Cd2As2, GaAs, InAs, PbAs, SnAs, ZnAs2 & Zn2As2 |