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Evaporation Tool

PVD Products provided this robust tool to a local company, and it was used for a decade to provide critical coating for MEMS development. After it was retired from service, PVD Products refurbished it to full operation. Please check out the set of key specifications below. This highly capable tool is available for rapid delivery. Please reach out to us via the Contact link on this page to inquire further. 

Specifications

  1. Large box chamber with hinged front door.
  2. Designed to be bulkhead mounted. Can also be installed in open lab space.
  3. Two Telemark electron beam evaporators, 4 pockets each x 25cc. Recently re-gaussed.
  4. Telemark 15kW DC power supply with dual outputs.
  5. Inficon IC5 deposition rate controller.
  6. Heated double planetary for eight 6” wafers. Heats to 550°C via IR lamps.
  7. Variety of substrate holders for wafers and smaller parts.
  8. Veeco 6 cm gridded RF ion source for ion-assisted deposition (IAD).
  9. Full electro-pneumatic valve and gauge package
  10. Computer control with OPTO-22 PLC and LabView.
  11. CTI 10 cryopump, Edwards dry backing pump.
  12. Manufactured 2005.
  13. Refurbished at PVD Products 2020.

Customize A System

Do you know the specifications you need to reach?
Contact us to discuss a custom system.
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