PVD Products has designed substrate heaters for various vacuum applications based on all types of heating elements, including IR lamps, Inconel sheathed resistance heaters, PBN-coated graphite heaters, resistive wires such as platinum, molybdenum, tantalum, and tungsten, as well as electron beam bombardment heaters. We can design heaters of various sizes and shapes that work in a variety of different background gasses, including oxygen, over a wide pressure range. We have made heaters for PLD, magnetron sputtering, evaporation, with RF and DC bias, etc. We also make unique heaters for coated conductor applications for the growth of YBCO and related buffer layers. These can be both contact or non-contact heaters as required.
Left: Inconel slug heated to 850°C via diode laser
Right: Inconel sheath heater for load lock bake-out
To obtain a quotation for your specific heating requirement, please tell us about your application. Be sure to describe:
Depending on your specific requirements, we can provide heaters with substrate rotation, linear translation, and/or electrical bias.