The sources operate from 0.5 mTorr to over 1 Torr. They come standard on 0.75-inch diameter SS shafts and can also be fully UHV compatible.
A wide variety of source options are available, such as custom-mounting flanges, manual tilt or in-situ tilt assemblies with or without computer control, shutters, chimneys, gas injection rings, etc. We also can provide sources for facing target sputtering.
We also offer a full line of power supplies with our sources. These sources can run RF, DC, or pulsed DC modes and can come with Type N, HN, or UHF connections as required. Targets do not require backing plates.