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Overview

The SEM services provided by PVD Products offer the benefits of production quality monitoring and troubleshooting, failure evaluation, process parameter evaluation, and R&D assistance for new products. All data is provided to the customer on a compact disc or can be downloaded to your computer from our secure FTP site.

Instrumentation and Software

The SEM instrumentation and software at PVD consists of the following:

• State-of-the-art Amray 3600 Field Emission Scanning Electron Microscope
• Guaranteed resolution of 40 Angstroms at 1 kV and 15 Angstroms at 15 kV
• Computer controlled, motorized stage and loadlock capable of handling up to 8-inch diameter samples for rapid sample turn-around
• Multi-sample holder allows the viewing of up to 15 samples at a time
• Our electron gun is a patented Schottke source that insures excellent images at both high and low accelerating voltage
• On-board software provides for simple particle measurement and more advanced CD measurement utilizing video profile analysis

A sample EDS spectrum

Imaging

All images are stored in standard Tiff format and are easily convertible to other formats. Our powerful field-emission SEM allows you to do the following:

• Collect digital images at 640 x 480,1280 x 960, or 2048 x 1920 pixels
• Magnification range of 10x to 300,000x and more on most samples
• View your samples uncoated at all accelerating voltages with excellent signal and resolution
• Perform quantitative and qualitative X-Ray analysis with high count rates at all accelerating voltages

Digital Reporting

We provide several different ways to report your results:

• All SEM images, X-Ray spectra, and data can be burned directly to compact disc.
• Images and/or spectra can be incorporated into a Microsoft Word report at no extra cost
• Images and X-Ray data can be incorporated into a PowerPoint presentation, for a small fee
• The resulting images and data are accessible via FTP