Custom Substrate Heaters
Customization
PVD Products has designed heaters for various vacuum applications based on all types
of heating elements, including IR lamps, Inconnel sheathed resistance heaters, boroelectric
heaters, resistive wires such as platinum, molybdenum, tantalum, and tungsten, as
well as electron beam bombardment heaters. We can design heaters of various sizes
and shapes that work in a variety of different background gasses, including oxygen
over a wide pressure range.
Images
Lamp-based high temperature substrate heater. Heats samples upto 950o
C in oxygen.
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Inconel sheath heater for loadlock bake-out
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Inconel disc with several TC's spot welded for uniformity test measurments. This
is 2-inch SiC heater assembly and can heat samples to over 1,000 C.
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Inconel slug heated to 850o C via diode laser
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Quotations
In order to obtain a quotation for your specific heating requirement, please tell
us about your application. Be sure to describe:
- the size and material of the substrate you would like to heat
- the actual substrate temperature that you need to achieve
- the design of the vacuum system into which the heater will be integrated
- what, if any, background or process gas the heater will encounter
Depending on your specific requirements, we can provide heaters with substrate rotation,
linear translation, and/or electrical bias.
For more details or to obtain a quote about our substrate heaters, please
contact us.