PLD/MBE Systems

PLD Systems and Components |

PLD 2100 |

PLD 2300 |

PLD 2500

Available Systems

PLD/MBE 2100 | PLD/MBE 2300/2500

The PLD 2100 system

Overview

PVD Products PLD/MBE 2100/2300/2500 line of deposition systems offer the user a wide choice of features that cannot be matched by any other PLD systems on the market today. Our PLD/MBE systems are designed specifically to grow epitaxial films, mono-layer by mono-layer film structures, and/or combinatorial thin films and can easily be integrated with a wide variety of other deposition techniques and sources such as magnetron sputtering, effusion cells, ozone generators, and atom or ion sources. These unique systems allow the user to utilize a number of deposition techniques in one small package to grow unique film structures.

Back Side View of a PLD/MBE 2500 system photo at University of Nebraska, courtesy of Dr. Christian Binek.

All of our PLD/MBE systems utilize our SiC or new lamp based substrate heaters. The open architecture of these heaters is fully High Pressure RHEED compatible providing RHEED patterns at pressure of 150 mTorr or higher in oxygen or other background gasses. Each system has a target manipulator to handle six (6) 2-inch diameter targets. All systems come with integrated optical trains that include our unique Intelligent Window (IW) (link to IW). The IW keeps your optical beam path clean for extended periods of time which becomes very important for loadlocked and UHV systems. The Intelligent Window also provides a means of measuring the laser beam energy that has gone through the entire optical train and about to hit the active target, thus providing reproducible deposition rates.

Our PLD/ MBE systems are fully compatible with our dual-wafer loadlock that provides the ability to remove and insert a wafer onto the heater stage in the deposition chamber with only one pump down cycle and thus significantly cuts sample turn-around time. The full series of PLD/MBE systems come with a current model Dell laptop computer with a user friendly Lab View™ interface. The software provides complete control over all the system functions including the laser and most other options. The software can also provide data logging for all relevant parameters for each deposition. Deposition recipes can be stored, recalled, and modified. The software also includes the ability to grow combinatorial thin films.

All systems come with integrated optical trains, facilities such as water distribution, compressed air and dry nitrogen regulators, and a power distribution box wired for your local electrical code. In short, PVD Products, PLD/MBE- 2000 Series Deposition Systems are complete turn-key tools that provide the user unsurpassed capability with ease of use, service, and strong technical support. Our tools are built to provide the user with the ability to grow high quality films for decades to come with a minimum of problems.