Magnetron Sources
PVD Products makes a wide variety of convertible HV and UHV magnetrons for various
target sizes.
Titan Magnetrons
The Titan Magnetron sputter sources range from 1 inch to 6 inches in diameter. These
magnetrons are bakeable to 200°C with the magnets in place.
Magnetic Field
2" Titan Magnetron Sputter Source
Our Titan Magnetron magnetic field design provides excellent film uniformity and
target utilization. These sources are based on a modular magnetic array that allows
the user to change from balanced to unbalanced sputtering modes in minutes. All
of our magnetrons utilize Nd-Fe-B magnets that are isolated from water and are easily
field replaceable. Brazed assemblies isolate the magnets from water so that there
is no water to vacuum interface, which causes leaks.
Sources & Targets
2" Titan Magnetron Sputter Source during operation
The sources operate from 0.5 mTorr to over 1 Torr. They come standard on 0.75" diameter
SS shafts and can also be fully UHV compatible.
A wide variety of magnetron source options are available, such as custom-mounting
flanges, manual tilt or in-situ tilt assemblies with or without computer control,
shutters, chimneys, gas injection rings, etc.
We also offer a full line of power supplies with our sources. These sources can
run RF, DC, or pulsed DC modes and can come with N, HN, or UHF connections as required.
Targets do not require backing plates.
Tilt assembly with scribe lines
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1-inch magnetrons
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3" Titan Magnetron with ±45 degree tilt
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Linear Magnetrons
Linear magnetrons can be made as big as 12" long. Please contact us with your specific
requirements.
PVD Products 8" Linear Magnetron Sources
8" x 1.5" linear magnetron with copper target inside deposition chamber
Convertible Magnetrons
PVD's convertible planar magnetron sputter sources are based on a proven magnetic
field design, providing ease of use in a small volume with excellent target utilization
and deposited film uniformity. For specific details, please see the above brochure.
Convertible Magnetrons