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Custom Deposition Systems

PVD Products manufactures deposition systems to suit various custom applications. We provide a variety of combination tools that mix and match various thin film PVD processes such as PLD and sputtering, PLD and evaporation, and sputtering and evaporation all with or without IBAD capabilities. Load-locks, custom substrate heaters, etc. can be integrated to meet the customers specific requirements. Please contact us for more details or to obtain a quote.

Example

The system pictured here is cryo-pumped and backable with a base pressure of 2 x 10^-9 Torr. A load lock and pre-chamber are included for substrate bake-out prior to entrance into the deposition chamber. The system includes a 3" substrate heater stage (to 900°C) with substrate rotation and azimuthal angle flexibility. Also, a 3" magnetron sputter deposition source, gridless ion source for substrate pre-clean, and IBAD processing are integrated into the system. Deposition monitoring includes a multiple Quartz Crystal Microbalance and Electron Impact Spectrometer system.