PLD T100 Coated Conductor System
Overview
PLD T100
PVD Products' PLD T100 coated-conductor tool is a field-proven deposition system.
It has demonstrated state-of-the-art Figure of Merit for second-generation coated
conductors using the PLD process.
If you already have your own coated conductor system,
coated conductor components are also available.
Applications
The PLD T100 has been designed for both R&D and production of long-length YBCO High
Temperature Superconducting tapes and buffer layers to over 200 meters in length.
This computer controlled reel-to-reel system will meet your most demanding deposition
requirements and is compatible with a wide variety of metallic tape compositions,
widths, and thicknesses. PVD also provides other types of deposition systems for
coated-conductor applications, including sputtering and evaporation.
System Features
Chambers and Frame
- Three chamber design
- Box style chambers with front mounted hinged doors
- Easy reel insertion and tape spooling
Reel-to-Reel System
- Tape velocity programmable from below 0.5 m/hour to over 20 m/hour
- Forward and reverse directions
- programmable tape tension
- Reel spool ID/OD: 200 mm/300 mm.
- Tape widths from 0.5 mm up to over 2 cm wide
- Idler-mounted encoder monitors the actual tape velocity
- Only the backside of the tape comes into contact with the idlers
Substrate Heaters
- Two types of heaters are available for our coated-conductor systems.
- A unique multi-zone substrate heater based on PVD Products non-contact IR lamp radiation
design. Nothing touches the tape through out the heater assembly. Uniform or graded
temperature profiles for proper film growth are achievable to temperatures in excess
of 850°C throughout the user defined deposition zone.
- Multi-Roll contact heaters are also available
- Programmable target-substrate distances are provided, via motorized Z stage for
either heater design for process optimization
Target Manipulator
- Unique target motion minimizes plume tilting
- Multiple target carousel with targets in size up to 200 mm
- Targets protected via water cooled shield
- Fast target indexing for quick target changes in less then 10 seconds.
Optical Train
- Complete AR coated optical trains provided
- Programmable Intelligent Window for extended deposition time
- In-situ fluence monitor
- Optical trains for either 248-nm or 308-nm
- Enclosed in a laser safe box
- Multi-plume optical trains available
Pumping, Vacuum Gauging and Pressure Control
- Pfeiffer 1,000 L/sec turbo drag pump
- Base pressure below 5 x 10-7 Torr
- Programmable downstream closed-loop pressure control
- Heated Capacitance Manometer, Ion Gauge, and two Convectron Gauges
- Multiple MFC’s available
Computer Control System
- Rack mounted Pentium computer with large flat panel display
- User friendly Lab VIEWTM software interface
- Complete system control and data logging
- Recipes can be stored and recalled and easily changed
Facilities
- Power Distribution box
- Water manifold with flow switches
- Pressure regulators for both chamber venting and pneumatic valves.
Options
Several options are available. Please consult the factory.
Coated Conductor Components
Coated-conductor components, such as Target Manipulators, substrate heaters, and
reel-to-reel transport systems, are also sold separately.
Please contact us for more information.