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Coated Conductor Systems

PVD Products can provide a full range of coated conductor systems for deposition of HTS materials and buffer layers. We have a wide range of product offering including:

• PLD Systems
• Sputter Deposition Systems
• IBAD Deposition (evaporation and sputtering)

PLD Systems Overview

PVD Products' PLD T1000 coated-conductor tool is a field-proven deposition system. In its first six months of use it demonstrated state-of-the-art Figure of Merit for second-generation coated conductors using the PLD process. It can be used for the deposition of REBCO films and CeO₂.

If you already have your own coated conductor system, coated conductor components are also available.

Applications

The PLD T1000 has been designed for both R&D and production of long-length YBCO High Temperature Superconducting tapes and buffer layers to 1 km in length. This computer controlled reel-to-reel system will meet your most demanding deposition requirements and is compatible with a wide variety of metallic tape compositions, widths, and thicknesses. PVD also provides other types of deposition systems for coated-conductor applications, including sputtering and evaporation.

System Features

Chambers and Frame

• Three chamber design
• Box style chambers with front mounted hinged doors
• Easy reel insertion and tape spooling

Reel-to-Reel System

• Tape velocity programmable from below 0.5 m/hour to over 200 m/hour depending on process
• Forward and reverse directions
• programmable tape tension
• Reel spool ID/OD: 150 mm/300 mm.
• Tape widths from 4 mm up to 12 cm wide, with multiple lanes available to enhance deposition rate
• Idler-mounted encoder monitors the actual tape velocity
• Only the backside of the tape comes into contact with the idlers

Substrate Heaters

• PVD can provide a variety of heater widths and lengths that match your specific application. Heaters blocks can readily reach temperatures of over 900° C and have pre-heat zones for fast moving tape.
• Multi-Roll contact heaters are also available
• Programmable target-substrate distances are provided, via motorized Z stage for either heater design for process optimization

Target Manipulator

• Unique target motion minimizes plume tilting
• Multiple target carousel with targets in size up to 200 mm
• Targets protected via water cooled shield
• Fast target indexing for quick target changes in less than 10 seconds.

Optical Train

• Complete AR coated optical trains provided
• Programmable Intelligent Window for extended deposition time
• In-situ fluence monitor
• Optical trains for either 248-nm or 308-nm
• Enclosed in a laser safe box
• Multi-plume optical trains available

Pumping, Vacuum Gauging and Pressure Control

• Pfeiffer 1,200 L/sec turbo drag pump
• Base pressure below 5 x 10^-7 Torr
• Programmable downstream closed-loop pressure control
• Heated Capacitance Manometer, Ion Gauge, and two Convectron Gauges
• Multiple MFC's available

Computer Control System

• Laptop computer with large flat panel display
• User friendly LabVIEW^TM software interface
• Complete system control and data logging
• Recipes can be stored, recalled, and easily changed

Facilities

• Power Distribution box
• Water manifold with flow switches
• Pressure regulators for both chamber venting and pneumatic valves.

Options

Several options are available. Please consult the factory.

Coated Conductor Components

Coated-conductor components, such as Target Manipulators, substrate heaters, and reel-to-reel transport systems, are also sold separately.

Please contact us for more information.