Coated Conductor Systems
PVD Products can provide a full range of coated conductor systems for deposition
of HTS materials and buffer layers. We have a wide range of product offering
including:
PLD Systems Overview
PLD T1000
PVD Products' PLD T1000 coated-conductor tool is a field-proven deposition system.
In its first six months of use it demonstrated state-of-the-art Figure of Merit
for second-generation coated conductors using the PLD process. It can be used for
the deposition of REBCO films and CeO2.
If you already have your own coated conductor system,
coated conductor components are also available.
Applications
The PLD T1000 has been designed for both R&D and production of long-length YBCO
High Temperature Superconducting tapes and buffer layers to 1 km in length. This
computer controlled reel-to-reel system will meet your most demanding deposition
requirements and is compatible with a wide variety of metallic tape compositions,
widths, and thicknesses. PVD also provides other types of deposition systems for
coated-conductor applications, including sputtering and evaporation.
System Features
Chambers and Frame
- Three chamber design
- Box style chambers with front mounted hinged doors
- Easy reel insertion and tape spooling
Reel-to-Reel System
- Tape velocity programmable from below 0.5 m/hour to over 200 m/hour depending on process
- Forward and reverse directions
- programmable tape tension
- Reel spool ID/OD: 150 mm/300 mm.
- Tape widths from 4 mm up to 12 cm wide, with multiple lanes available to enhance deposition rate
- Idler-mounted encoder monitors the actual tape velocity
- Only the backside of the tape comes into contact with the idlers
Substrate Heaters
- PVD can provide a variety of heater widths and lengths that match your
specific application. Heaters blocks can readily reach temperatures of over 900° C
and have pre-heat zones for fast moving tape.
- Multi-Roll contact heaters are also available
- Programmable target-substrate distances are provided, via motorized Z stage for
either heater design for process optimization
Target Manipulator
- Unique target motion minimizes plume tilting
- Multiple target carousel with targets in size up to 200 mm
- Targets protected via water cooled shield
- Fast target indexing for quick target changes in less than 10 seconds.
Optical Train
- Complete AR coated optical trains provided
- Programmable Intelligent Window for extended deposition time
- In-situ fluence monitor
- Optical trains for either 248-nm or 308-nm
- Enclosed in a laser safe box
- Multi-plume optical trains available
Pumping, Vacuum Gauging and Pressure Control
- Pfeiffer 1,200 L/sec turbo drag pump
- Base pressure below 5 x 10-7 Torr
- Programmable downstream closed-loop pressure control
- Heated Capacitance Manometer, Ion Gauge, and two Convectron Gauges
- Multiple MFC's available
Computer Control System
- Laptop computer with large flat panel display
- User friendly LabVIEWTM software interface
- Complete system control and data logging
- Recipes can be stored, recalled, and easily changed
Facilities
- Power Distribution box
- Water manifold with flow switches
- Pressure regulators for both chamber venting and pneumatic valves.
Options
Several options are available. Please consult the factory.
Coated Conductor Components
Coated-conductor components, such as Target Manipulators, substrate heaters, and
reel-to-reel transport systems, are also sold separately.
Please contact us for more information.
Coated Conductor Systems - PLD Coated Conductor Deposition
Systems - Custom Coated Conductor Deposition