November 28, 2011
PVD Products announces it has signed a lease for 17,000 square feet of prime
manufacturing space located at 35 Upton Drive in Wilmington MA. This location
will increase PVD's current space by a factor of 2.5, greatly improving our ability
to keep up with our increased sales volume. PVD Products will move to its new
location in June 2012 after build-out of the space is completed.
October 26, 2011
A video of the PLD/MBE Systems workflow has been posted on
YouTube.
May 17th, 2011
PVD Products announces that it has received yet another large purchase
order for the deposition of thin MgO buffer layer material on 1 cm wide
metallic tapes for the subsequent growth of HTS materials. This IBAD
coated conductor system is based on ion beam sputtering from a large MgO
target with an ion beam assist source. The system will use multiple
lanes of 1-cm wide tape and provide in-situ RHEED analysis of the
growing material with tape lengths up to 1 km long. This is the third
system purchased by this customer over the past few years indicating
strong confidence in PVD Products capabilities to provide complex coated
conductor deposition technology.
May 2nd, 2011
PVD Products has selected PicoTech as its new representative in Israel. Dr.
James Greer says that PicoTech brings both strong sales, service, and technical
support to its customers and should be a perfect fit for the type of equipment
that PVD Products sells.
April 14th, 2011
PVD Products, Inc. delivers its first Vis/NIR Resonant MAPLE System to
University of Western Ontario. This system includes a frequency doubled
Nd:YAG laser with OPO that covers the range of ~680 - 2400 nm. Included
in the automated system is a MAPLE target. Solid targets can be used as
well. This is the first commercial Resonant MAPLE system on the market.
March 4th, 2011
PVD Products has received a large purchase order to build a unique
reel-to-reel tool dedicated to IBAD MgO deposition for High Temperature
Superconducting (HTS) coated-conductor applications. The system will
include the ability to map out the ion beam profile from linear RF ion
sources to provide optimized uniformity on the substrate surface. The
system will also include in-situ diagnostics such as scanning RHEED to
monitor the film quality within the deposition zone along the length of
the tape. This system expands PVD Products coated conductor product
line which currently includes reel-to-reel Pulsed Laser Deposition and
magnetron sputtering systems used for deposition of HTS materials as
well as a wide variety of buffer layers including ceria and protective
over-layers such as silver. This new IBAD system is scheduled to be
delivered in 2011.
February 28, 2011
PVD Products delivers its third reel-to-reel coated conductor
machine to a major Japanese superconducting research lab.
This new PLD system includes an extended length heater
providing for much faster tape speeds during the film growth
process. This third system is earmarked for the deposition
of buffer layers such as cerium oxide at rates of 100 m/hour.
The system includes PVD's multi-track capability with a
multi-zone heater. It also includes PVD's unique XYΘ target
manipulator that handles three six-inch diameter targets.
The XYΘ manipulator provides for a constant plume direction
for extremely long periods of time. Also the system uses
PVD's large coated-conductor Intelligent Window (link to IW
here), and full multi plume capability. Both PVD's
Intelligent Window and XYΘ target manipulator make it
possible to grow 1 km lengths of tape without having to stop
deposition and break vacuum to clean optics or resurface
targets. The system is mated Coherent STEEL excimer laser to
provide high growth rates. The system, once integrated will
provide buffer layers on 1-cm wide tapes with a length of 1
km in five hours time. This third sale to Japan indicates the
customer's strong confidence in PVD's capabilities to provide
a unique high quality product that meets the customer's ever
increasing needs.
February 12, 2011
PVD Products has received a large order for a UHV PLD/MBE 2500
deposition system from a customer based in China. The PLD/MBE
2500 includes six 2-inch diameter targets on a dual axis rotary
feedthrough with water cooled stage, high temperature heater
mounted on motorized Z-stage for variable target-to-substrate
distance, along with PVD's unique Intelligent Window. This UHV
system will incorporate five effusion cells on the back wall of
the chamber besides the standard PLD/MBE components. The system
also includes a Staib high pressure RHEED package, RF substrate
bias, and PVD's dual wafer loadlock. The system demonstrates
the unique nature of PVD's PLD/MBE 2000 series that allows the
integration of a wide variety of deposition tools such as PLD
and effusion cells, atom, ion, or sputter sources all within one
package.
January 2011
PVD Products is now offering a line of DC to DC and RF/DC switch boxes for
existing sputter systems. The DC switch can take the power from one DC power
supply and send it to one of up to six different magnetron sputtering sources via
computer control. The RF/DC switch box will allow the customer to quickly switch
from RF sputtering to DC sputtering (or vice-versa) via computer control.
October 2010
PVD Products books another order for a Reel-to-Reel multi-lane/multi plume PLD
system for deposition of ceramic buffer layers onto metal tapes. This system is
designed with multi-lane/multi plume capability, an extended length substrate
heater to preheat the tape traveling at high speeds, and is fully computer
controlled. This system is designed to deposit buffer layer material at 100
m/hour.
September 2010
PVD Products has booked an order for a 2nd turn-key combinatorial sputter
deposition system. This system is designed for 100 mm diameter wafers and uses
smaller 1" targets. This system is scheduled to ship in May 2011.
September 2010
PVD Products has installed a turn-key combinatorial sputter deposition system for
300 mm diameter wafers in a major semiconductor fab. This system includes four
PVD Products Titan in-situ tiltable magnetron sputter sources mounted on motorized
Z-stages. Each source is connected to both an RF and DC power supply through a
programmable RF/DC switch. The 300 mm wafer is transferred to a wafer holder
mounted to a vacuum compatible X-Y stage with 1 micron positioning resolution.
Co-sputtering from up to four sources through a metal mask creates a well defined
pad on the wafer. Using the X-Y stage to step location and using the sources at
different power levels and/or varying target to substrate distances allows the
deposition of a wide range of varying material compositions in a computer
controlled fashion. This system is also mated to a central robot wafer handler.
July 2010
PVD Products had installed a unique turn-key PLD system for 300 mm wafers in a
large semiconductor fab. This system is married to a central robot and wafer
handler. Besides using one of PVD's unique X-Y-Θ type target manipulator this
PLD this system also included a multipocket electron beam evaporation unit and
high temperature heater.
April 2010
PVD Products has installed a turn-key coated conductor sputtering system for the deposition
of cerium oxide buffer layers and protective silver metal layers onto 1 cm wide metal tapes.
The system utilizes PVD Products multi-lane tape transport system with a 6" x 3"
rectangular magnetron source for large area deposition. Included with the system is a
substrate heater used for cerium oxide buffer layers and a substrate cooling stage for
deposition of silver protective layers.The system is completely computer controlled. The
system can deposit 1 micron of Ag at a tape speed of 15 m/hour.
Show News Archive
December 14, 2007
PVD Products has been awarded a Phase I SBIR entitled "High-Throughput Experimentation
Physical Vapor Deposition (PVD) Chamber for Accelerated Microelectronics Materials
Research and Development" from the Defense Microelectronics Activity group located
in McClellan, CA. Under this program, PVD Products will design a system for co-sputtering
using novel heating techniques to grow a large library of thin films of varying
compositions and microstructures. The goal of this Phase I SBIR program is to provide
the design of a large multi-source system with the capability of growing a minimum
of 100 test pad combinations of materials on a 200 mm diameter wafer.
December 7, 2007
PVD Products has successfully completed the installation of a unique MAPLE/IRRPLD
system at Jefferson Lab, Newport News, Virginia. This system will utilize the unique
properties of the JLab's Free Electron Laser to deposit a variety of polymer films.
The system includes three rotating frozen MAPLE Targets as well as three solid targets
along with a 4-inch substrate heater and loadlock. Both Matrix Assisted Pulsed Laser
Evaporation and Infrared Resonant Pulsed Laser Depositon can be conducted in the
same system.
October 12, 2007
PVD Products has successfully completed the installation of its third turnkey coated
conductor PLD tape machine at Shanghai Jiao Tong University. These machines have
been used to deposit REBCO thin films onto 1 cm wide tapes over 200 meters long,
with critical currents above 240 amps. This system utilizes a multi-roll contact
style heater and can deposit both buffer layers and superconductors and makes use
of PVD Products' unique target manipulator.
August 15, 2007
PVD Products successfully completed the installation of a unique PLD system at the
University of Leeds in England. This system has two complete optical trains for
growing thin films. One optical train is for a FS laser operating at 800 nm, and
one optical for an excimer laser operating at either 248 or 193 nm.
July 2007
PVD Products is pleased to announce that it has selected Jung Won Corporation to
be its exclusive distributor in Korea for its full line of thin film deposition
products. Jung Won Corporation has a strong background in thin film deposition,
UHV vacuum techniques, RHEED, and materials processing. Their expertise will provide
both its Korean customers and PVD Products with strong technical and sales support.
June 29, 2007
PVD Products ships first Nano PLD system for use with a Pico-second laser
February 22, 2007
PVD Products books an order for a unique multi-target MAPLE and RIRPLD system that
will be delivered to Jefferson Labs and used with the JLABS Free Electron Laser.
February 15, 2007
PVD Products books order for its third reel-to-reel Coated-Conductor PLD machine
February 2006
PVD Products introduces its new line of Titan Magnetron Sputter sources.
December 19, 2006
PVD Products books order for a unique dual beam PLD chamber. This system will have
two complete optical trains. One for a Coherent Libra FS laser and one for a Coherent
Excimer laser.
January, 2004
PVD Products ships its second reel-to-reel coated conductor machine to Japan. This
system has been used to grow tapes that were 212 m long with current carrying capability
of ~250 amps.
January, 2004
PVD Products ships its first Nano PLD system with a Load Lock to Purdue University.
July, 2003
PVD Products announces that it has received an order for a second PLD Reel-to-Reel
Tape machine for coated conductor technology. These machines are designed to put
down buffer layers and high temperature superconductors on thin metallic tapes over
100 meters in length.
June, 2003
PVD Products announced that is has shipped their first two Nano PLD systems. PVD
Products announced the Nano PLD system in November of 2002. The Nano PLD systems
are geared toward University users and have many of the features of the PLD 3000
and PLD 5000 systems. PVD Products currently has a back log of two more Nano PLD
systems and expects to ship at least six Nano PLD systems in 2003.
January, 2003
PVD products is pleased to announce the shipment of the first PLD 100 meter reel
to reel tape deposition system to Japan.
June, 2002
PVD Products is pleased to announce the shipment of a Fiber Coat Evaporation system
with the ability to simultaneously coat 288 optical fibers.
April, 2002
PVD Products is pleased to announce Ori Afek of Odem Scientific Applications Ltd.
as our representative in Israel.
November, 2001
PVD Products is pleased to announce Steve Abush of ARS Associates as our representative
covering the Mid Atlantic states including NY, NJ, PA, DE, DC, MD, VA, and NC.
November, 2001
PVD Products is pleased to announce Paul Robinson of Datacomp Electronics Inc. as
our representative in Canada.
May, 2001
PVD Products has been awarded a Phase I SBIR program to develop techniques to deposit
thin film polymer coatings on Surface Acoustic Wave devices for chemical sensor
applications. Under this program PVD Products will design a large area Matrix Assisted
Pulsed Laser Evaporation (MAPLE) tool for coating SAW devices. PVD is working with
the
Naval Research Labs on
this project.
May, 2001
PVD Products is pleased to announce Applied Science Korea Corporation (ASK Corp.)
as its sales representative in Korea.
March, 2001
PVD Products is pleased to announce Linston Advanced Technologies Corp. (LATEC)
as its sales representative in Taiwan. We are also pleased to announce the shipment
of our second PLD 5000 system as well as a PLD 3000 system to Japan.
February, 2001
PVD Products ships its first system from the Wilmington, MA facility. A PLD 5000
was shipped to Japan and will be used to grow high quality super conducting thin
films on a variety of substrates. PVD Products is also pleased to announce Midwest
Vacuum as its sales representative in Illinois, Michigan, Ohio, Indiana, Kentucky,
Missouri, Minnesota, Wisconsin, Iowa, North Dakota, and South Dakota.
November, 2000
PVD Products receives orders for three PLD systems. Orders were received for two
PLD-5000 units for depositing oxide films over 5-inch diameter substrates. One of
these machines will be a fully automated system. An order for a PLD-3000 unit with
glove box attachment was also received for depositing lithium based oxide films
over 3-inch diameter substrates. All three of these machines are scheduled to ship
the first quarter of 2001.
October, 2000
PVD Products takes up residence at 231 Andover Street, Wilmington, Massachusetts,
USA. Facilities include a 1,000 square foot applications lab and a 3,000 square
foot manufacturing area.
Events
[ News ]
April 28-May 3, 2012
SVC Show
Location: Santa Clara, California, USA.
March, 2012
APS March Meeting Show
Location: Boston, Massachussetts, USA.
November 29th - Dec 1st, 2011
Exhibition at the Fall MRS Show, booth 1200
PVD will be displaying one of its PLD/MBE 2300 systems at the show.
November 30 - December 2, 2010
Fall Materials Research Society Meeting
[ Website ]
Location: Boston, Massachusetts, USA.