Larger Area R&D and Pilot Production Tools

PVD Products’ R&D and Pilot Production Pulsed Laser Deposition Systems are capable of depositing high quality uniform films on substrates up to 6 inches in diameter. Due to the unique blackbody style heater developed by Dr. Greer in the late 1980’s, these systems provide unsurpassed substrate temperature uniformity.

PLD 2000 & PLD 3000 Deposition Systems

The PLD 2000 and PLD 3000 systems provide uniform multilayer films deposited by PLD over substrates up to 3 inches in diameter. These systems include complete software packages and can be used to grow combinatorial thin films as well.

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PLD 5000 & PLD 6000 Deposition Systems

The PLD 5000 and PLD 6000 are capable of depositing high quality uniform films on substrates up to 6 inches (150 mm) in diameter. Our systems use a box-style chamber with a large front-mounted hinged door. This allows for very easy access to the substrate and target.

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Customize A System

Do you know the specifications you need to reach?
Contact us to discuss a custom system.

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